Skip Navigation

Technology Development

Office of Research

Office of Research

Self-Calibrating Modulation Ellipsometer

Disclosure #: 1161
Description: Ellipsometers use polarized light to characterize thin film properties like thickness and refractive index. This novel ellipsometer can take continuous sample measurements of changing films and will completely self calibrate. The process spectroscopy market is expected to reach $232 million in 2009 (Source). Interest in analyzing surfaces is increasing, and products that make data acquisition easier have a market advantage.
Advantage(s):
  • Fully self-calibrating
  • Permits continuous sample measurement
  • Contains no moving parts
  • High signal-to-noise ratio
  • Compact and robust
  • Suitable for remote and harsh environments
  • Able to analyze samples in a changing environment
Application(s):
  • Determine thin film thickness and optical constants
  • Monitor growth of thin films
  • Analyze nitrides and oxides for semiconductor industry
  • Characterize film degradation of protective coatings
  • Analyze products like flat panel displays and solar cells
Patent(s): US patent #5,416,588.pdf
Licensing Manager: Dr. Jane Garrity
jgarrity@nutechventures.org
(402) 472-1782
Inventor(s): Stephen Ducharme
Technology Brief: Marketing Brief - Self-Calibrating Modulation Ellipsometer.pdf


Back